Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry

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题名:	Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry
作者:	Wang,SF;Chiu,MH;Chen,WW;Kao,FH;Chang,RS
贡献者:	光電科學研究所
关键词:	RESOLUTION
日期:	2009
上传时间:	2010-06-29 19:42:41 (UTC+8)
出版者:	中央大學
摘要:	A small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry is proposed. In this paper, a small displacement can be obtained only by measuring the variation in phase difference between s- and p-polarization states for the total internal reflection effect. In order to improve the sensitivity, we increase the number of total internal reflections by using a parallelogram prism. The theoretical resolution of the method is better than 0.417 nm. The method has some merits, e.g., high resolution, high sensitivity, and real-time measurement. Also, its feasibility is demonstrated. (C) 2009 Optical Society of America
關聯:	APPLIED OPTICS
显示于类别:	[光電科學研究所] 期刊論文

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