近年來電化學放電加工(Electrochemical Discharge Machining, ECDM)被運用於加工非導體脆硬材料，而且已經證實可對Pyrex玻璃進行三維微結構的加工。不過，現今利用電化學放電進行微銑削加工卻無法有效的控制加工精度。因此本文以脈衝電壓取代直流電壓、電極轉速與水平加工進給率為參數，在Pyrex玻璃上進行微流道的加工，並探討加工後微流道的形狀及尺寸精度及其對於加工特性之影響。 實驗結果顯示，將直流波形能量加工改以脈衝能量輸入(40 V，Ton：Toff = 2ms：2ms)，並結合電極的旋轉(1500 rpm)，能使加工後的微溝槽具有最佳的改善效果。最後利用掃描式銑削加工法進行高深寬比之微溝槽與複雜三維微結構加工的可行性探討，結果發現加工後之微溝槽與三維結構具有極高的尺寸精度，並證明了電化學放電加工可真實應用於Pyrex玻璃上製作三維微結構之可行性。 Electrochemical discharge machining (ECDM) is demonstrated to be a potential process for 3D-microstructuring of Pyrex glass. However, it is difficult to obtain an accurate machining shape with a good surface quality because it is difficult to control the discharge characteristics near the tool tip. To improve the machining quality of the ECDM micromilling process, microgroove machining experiments were conducted in this study. Three factors affecting ECDM micromillimg performance, pulse voltage, rotational rate of tool and feed velocity of tool were taken up as machining parameters to investigate their influences on machining performance. The results indicate that optimum combinations of both pulse voltage (40V, Ton：Toff = 2 ms：2 ms) and rotational speed (1500 rpm) will realize better machining accuracy. The feasibility of 3-dimensional microstructure machining was demonstrated by a layer-by-layer ECDM micromilling machining. Complex structures were made to demonstrate the great potential for the 3D microstructuring of Pyrex glass of the ECDM micromilling process.
