Visualization of the effect of liquid dispensing method during spin coating

NCU Institutional Repository > 工學院 > 機械工程研究所 > 期刊論文 > Item 987654321/30545

請使用永久網址來引用或連結此文件: http://ir.lib.ncu.edu.tw/handle/987654321/30545

題名:	Visualization of the effect of liquid dispensing method during spin coating
作者:	Huang,Kuo-Hsin;Chou,Fu-Chu;Yang,Cheng-Pin
貢獻者:	機械工程研究所
關鍵詞:	ROUGH ROTATING-DISK;FINGERING INSTABILITY;FLOW;FILM;REDUCTION;MODEL
日期:	2007
上傳時間:	2010-07-06 16:21:45 (UTC+8)
出版者:	中央大學
摘要:	In this study, we investigate how the method of liquid dispensing, including released drop, centered injection and spiral injection, affects the coating efficiency during spin coating processes. The flow visualization indicates that the method of liquid d
關聯:	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
顯示於類別:	[機械工程研究所] 期刊論文

文件中的檔案:

檔案	描述	大小	格式	瀏覽次數
index.html		0Kb	HTML	345	檢視/開啟

在NCUIR中所有的資料項目都受到原著作權保護.

社群 sharing