Eight-phase-level diffractive microlens for beam splitting using LIGA-like process

NCUIR > Engineering College > Graduate Institute of Mechanical Engineering > journal & Dissertation > Item 987654321/30598

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/30598

Title:	Eight-phase-level diffractive microlens for beam splitting using LIGA-like process
Authors:	Yang JJ,Liao YS,Chen CF
Contributors:	機械工程研究所
Keywords:	ROTATION-ANGLE METHOD;OPTICAL-ELEMENTS;FABRICATION;DESIGN
Date:	2006
Issue Date:	2010-07-06 16:23:04 (UTC+8)
Publisher:	中央大學
Abstract:	An eight-level diffractive microlens (DML) array for beam splitting is designed and fabricated by a LIGA-like process. The pattern of this dual-focal-point DML was designed using the optimal rotation-angle method and realized by silicon etching, nickel (N
Relation:	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
Appears in Collections:	[Graduate Institute of Mechanical Engineering] journal & Dissertation

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