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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/30620


    Title: Fabrication of curved structures with electron-beam and surface structure characterization
    Authors: Chen,JK;Ko,FH;Chen,HK;Chou,CT;Chen,HL;Chang,FC
    Contributors: 化學工程與材料工程研究所
    Keywords: OPTICAL-ELEMENTS;DEPOSITION;STEREOLITHOGRAPHY;MICROSTRUCTURES;MICROCHIP;SYSTEMS;SILICON;MASK
    Date: 2004
    Issue Date: 2010-07-06 16:23:33 (UTC+8)
    Publisher: 中央大學
    Abstract: In this article, we propose a fabrication technology for preparing curved structures using an electron-beam writing strategy. Oxygen plasma treatment increases the surface roughness of SU-8 polymer, while minimizing the outgassing problem and stabilizing
    Relation: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
    Appears in Collections:[National Central University Department of Chemical & Materials Engineering] journal & Dissertation

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