Fabrication of curved structures with electron-beam and surface structure characterization

NCUIR > Engineering College > National Central University Department of Chemical & Materials Engineering > journal & Dissertation > Item 987654321/30620

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/30620

Title:	Fabrication of curved structures with electron-beam and surface structure characterization
Authors:	Chen,JK;Ko,FH;Chen,HK;Chou,CT;Chen,HL;Chang,FC
Contributors:	化學工程與材料工程研究所
Keywords:	OPTICAL-ELEMENTS;DEPOSITION;STEREOLITHOGRAPHY;MICROSTRUCTURES;MICROCHIP;SYSTEMS;SILICON;MASK
Date:	2004
Issue Date:	2010-07-06 16:23:33 (UTC+8)
Publisher:	中央大學
Abstract:	In this article, we propose a fabrication technology for preparing curved structures using an electron-beam writing strategy. Oxygen plasma treatment increases the surface roughness of SU-8 polymer, while minimizing the outgassing problem and stabilizing
Relation:	JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Appears in Collections:	[National Central University Department of Chemical & Materials Engineering] journal & Dissertation

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