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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/30794


    Title: Thickness and optical constants measurement of thin film growth with circular heterodyne interferometry
    Authors: Hsu,CC;Lee,JY;Su,DC
    Contributors: 機械工程研究所
    Date: 2005
    Issue Date: 2010-07-06 16:27:32 (UTC+8)
    Publisher: 中央大學
    Abstract: in this article, we report an alternative method for in situ monitoring of the thickness and refractive index of thin film during the growth process. We design a special structure with a thickness-controlled air film to simulate the process of thin film g
    Relation: THIN SOLID FILMS
    Appears in Collections:[機械工程研究所] 期刊論文

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