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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/3297


    Title: TFT-LCD產業揮發性有機物(VOCs)空氣污染之減量與防制之研究;Investigation on VOCs Emission from TFT-LCD industry
    Authors: 蘇浩傑;HAO-CHIEH SU
    Contributors: 環境工程研究所碩士在職專班
    Keywords: 冷凝器;揮發性有機物;薄膜電晶體液晶顯示器;去除效率;沸石轉輪;蓄熱式燃燒爐;TFT-LCD;Volatile Organic Compounds;Zeolite;Regenerative burner;condenser
    Date: 2008-07-05
    Issue Date: 2009-09-21 12:14:09 (UTC+8)
    Publisher: 國立中央大學圖書館
    Abstract: 國內已將TFT-LCD (薄膜電晶體液晶顯示器Thin-film transistor liquid-crystal display)列為兩兆雙星產業重點培植產業之一,隨者產品世代不斷提升及玻璃基板面積的擴大,隨之其排放製程廢氣量也繼續增加,為了因應光電產業之蓬勃發展而隨之帶來的空氣污染問題,環保署亦已立法通過【光電材料及元件製造業空氣污染管制及排放標準】並於民國95年1月5日訂定發布 ,希望藉由法律達到有效規範光電產業製造所產生之揮發性有機物及無機酸排放之目的。本論文針對TFT-LCD廠實廠進行VOCs進行減量之成果加以整理分析,希望藉由此項研究,分析產業之尾氣排放廢氣之成分、風量及單位產品之污染物排放量 本研究結果得知: 1.串聯多道空氣污染設備:當空氣污染物生產機台排放出來至煙道口排放至環境的過程中,以兩種以上防制設備串聯處理,可有效降低空氣污染物之排放,提高處理效率。 2.製造改善:降低或停止使用產生空氣污染物之原料,由源頭改善而非管未處理,為最有效降低空氣污染物排放之方法;本研究中去光阻製程以CO2取代IPA,不但減少VOCs之排放,同時亦減少該工廠之CO2 排放量。 3.現有空氣污染防制設備改善(操作改善): 藉由檢測分析了解現有空氣污防制設備中,TO爐或RTO其燃燒溫度越高,產生之燃燒副產物越少且濃度越低。 4.不同之空氣污染防制設備處理效率比較,經由檢測分析,Scrubber及活性碳流體化床與冷凝系統之效率不佳,即使進行各種操作改善仍無法提升效率,因此,更新污染防制設備為沸石轉輪與RTO,有效達到效率提升之目的。 5.實廠VOCs實際排放量,本研究五代廠(CF內製)之VOCs排放係數為 0.087 kg/ m2。與環保署公告液晶顯示器製造程序之排放係數0.18 kg/ m2 相較,約相差兩倍。 希望通過本項研究,能提供相關業者作為空氣污染操防制及後續新建廠改進之參考。 In Taiwan TFT-LCD (Thin Film Transistor Liquid Crystal Display) is considered as one of the major industries by the government. By following with the next generation growing and glass substrate expansion, manufacturing exhausted emission has increased continuously. In order to resolve air pollution issue caused by the booming optoelectronics industry, the government published “Air Pollution Controls and Emission Standards for Optoelectronics Materials and Parts Manufacturing” on 5th Jan. 2006. This thesis focuses on the analysis of VOCs emission and reduction from a fifth-generation TFT-LCD manufacturing plant. There are five categories in air pollution improvement methods. (1)Combine two or more air pollution control devices in series – It can increase the efficiency and reduce the amount of air pollution emission by combining two or more equipments in series. (2)Process improvement –To reduce or stop using the materials which cause air pollution. Compared with the tail-of-pipe air pollution control reduction of it’s formation from the source is more effective. (3)Control equipment improvement –Optimization of the operation of existing air pollution control devices optimize the operation parameter to increase the control efficiency and reduce emission by analysis the efficiency of current control system. (4)Compared with the fluidized bed adsorption system and scrubber, the RTO and zeolite system resnlts in a better performance. (5)The VOC emission factor obtained from this study for TFT-LCD (G5,CF in house) manufacturing process is 0.087 kg/ m2.
    Appears in Collections:[環境工程研究所碩士在職專班] 博碩士論文

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