摘 要 隨著半導體產業對於CMP化學機械研磨產能的需求成長，裝填研磨液的化學桶槽之需求，亦呈正比例增加的趨勢。一隨般而言，盛裝研磨液的化學桶主要有兩種型式，第一種是小開口、容量200公升(53加侖)的PE塑膠化學桶，；第二種則為1000公升方框式化學桶。酸、鹼性研磨液抽取後，一般先儲存於中央貯槽，再導入研磨機台供研磨製程使用。而所剩餘之盛裝容器及殘留之研磨液處置，即為本次研究之標的。 本研究方法係以實廠操作資源化再利用過程以12周時間進行相關數據之統計，並以完全之質量平衡數據佐證再利用之可行性。首先將研磨液空桶內部充分洗淨，再將殘液收集並以適當的掺配比例再製成原物料。本研究主要成果結論：盛裝容器及殘留之研磨液總量78.8公噸，其中盛裝容器數3,254只(38公噸)，研磨殘液量40.8公噸，經實廠操作數據顯示研磨殘液再利用量26.4公噸，矽酸鉀產量22.01公噸，廢水產生量174.7公噸，其廢棄物(污泥)產生量3.6公噸。另本研究中酸性研磨液所含5%氧化鋁成分並無法摻配生成再利用物，上述氧化鋁殘液應抽卸排入污泥槽進行脫水處理後，再將其盛裝容器等待進一步處理。研究結果顯示所有清洗完成之空桶均符產品所要求之充填品質，再生之研磨液亦符合工業原料之規格，故空桶與研磨殘液再利用可行性相當高，對於工業減廢與資源再生具正面意義。 Recovery Investigation Of The Chemical Mechanical Polishing Slurry And Slurry Empty Drum Abstract The increasing demand of CMP slurry tanks or drums is proportion to the increasing demand of CMP process capacity. General speaking, there are two types of slurry containers. One is 200-liter PE plastic drum with small opening. Another one is 1000-liter cubic-frame drum. The acid or base slurries are pumped out to a large central supply tank and then supplied to the CMP tools for process. The treatment of these empty drums and residual slurries is the research target. The research method is to proceed with the recovery operation procedure on-site for 12 weeks to gather data and statistics. The mass balance demonstrates the recovery is practicable. The inner of empty slurry drums are well cleaned first. And then the residual slurries are collected and recovered as raw materials by adding and mixing. The major conclusion of the research is as following: The empty drums and residual slurries are 78.8 tons, which empty drums are 38 tons, residual slurries are 40.8 tons. After the recovery operation procedure on-site, 26.4 tons of slurries are recovered, and produced 22.01 tons of potassium silicate, 174.7tons of waste water and 3.6 tons of sludge at the same time. In the research, 5% aluminum oxide in acid slurries can not react and generate something useful. So the residual aluminum oxide solution are drained to sludge tanks and dewatered, then the sludge are filled in containers waiting for treatment. The search result shows the cleaned empty drum can meet the product filling requirements, and recovered slurry can meet the industrial specifications. So the reuse of empty slurry drums and the recovery of residual slurries are practicable, and they are positive in industrial waste reduction and resource recovery.
