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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35230


    Title: Surface Properties of the AlGaN/GaN Superlattice Grown at Different Temperatures by Metalorganic Chemical Vapor Deposition
    Authors: Lai,Wei-Chih;Kuo,Cheng-Huang;Yen,Wei-Yu;Sheu,Jinng-Kong;Chang,Shoou-Jinng
    Contributors: 光電科學與工程學系
    Keywords: LASER-DIODES;DEFECTS;LAYERS;GAN
    Date: 2008
    Issue Date: 2010-07-07 14:07:17 (UTC+8)
    Publisher: 中央大學
    Abstract: AlGaN/GaN strained layer superlattice (SLS) structures were prepared by metalorganic vapor deposition (MOCVD) under various growth conditions. It was found that the surface morphology and V-shaped pits were determined by growth temperature. Two different
    Relation: JAPANESE JOURNAL OF APPLIED PHYSICS????
    Appears in Collections:[光電科學與工程學系] 期刊論文

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