Polarization modulation imaging ellipsometry for thin film thickness measurement

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35277

Title:	Polarization modulation imaging ellipsometry for thin film thickness measurement
Authors:	Chou,Chien;Teng,Hui-Kang;Yu,Chih-Jen;Huang,Hong-Sheng
Contributors:	光電科學與工程學系
Keywords:	PARAMETERS MEASUREMENT;OPTICAL HETERODYNE;NULL ELLIPSOMETER;ROTATING ANALYZER;PHASE;INTERFEROMETRY;POLARIMETRY;ERROR
Date:	2007
Issue Date:	2010-07-07 14:08:53 (UTC+8)
Publisher:	中央大學
Abstract:	A polarization modulation (PM) imaging ellipsometer is proposed and setup in order to measure precisely the thickness of thin film. Five images are collected sequentially by CCD camera with respect to five pre-determined azimuth angles of a quarter wave p
Relation:	OPTICS COMMUNICATIONS
Appears in Collections:	[Department of Optics and Photonics] journal & Dissertation

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