Si nanocrystals embedded in Si suboxide matrix grown by laser-assisted chemical vapor deposition at room temperature

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35404

Title:	Si nanocrystals embedded in Si suboxide matrix grown by laser-assisted chemical vapor deposition at room temperature
Authors:	Lee,CT;Lin,CH
Contributors:	光電科學與工程學系
Keywords:	SILANE
Date:	2004
Issue Date:	2010-07-07 14:13:33 (UTC+8)
Publisher:	中央大學
Abstract:	We present a novel laser-assisted chemical vapor deposition (LACVD) system for growing Si nanocrystals embedded in a Si suboxide matrix at room temperature. Varying growth gas ratio caused the observed photoluminescence (PL) light emission to vary from 1.
Relation:	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Appears in Collections:	[Department of Optics and Photonics] journal & Dissertation

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