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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35452


    Title: Silicon-based transmissive diffractive optical element
    Authors: Lee,CC;Chang,YC;Wang,CM;Chang,JY;Chi,GC
    Contributors: 光電科學與工程學系
    Date: 2003
    Issue Date: 2010-07-07 14:15:30 (UTC+8)
    Publisher: 中央大學
    Abstract: A silicon nitride (SiNx) membrane diffractive optical element (DOE) designed to exhibit beam-splitting and focusing behavior at visible wavelengths has been fabricated and tested. Since the fabrication process is based on silicon micromachining technology
    Relation: OPTICS LETTERS
    Appears in Collections:[光電科學與工程學系] 期刊論文

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