Measuring large step heights by variable synthetic wavelength interferometry

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35478

Title:	Measuring large step heights by variable synthetic wavelength interferometry
Authors:	Lu,SH;Lee,CC
Contributors:	光電科學與工程學系
Keywords:	REFRACTIVE-INDEX;LASER;AIR
Date:	2002
Issue Date:	2010-07-07 14:22:55 (UTC+8)
Publisher:	中央大學
Abstract:	Many mechanical and optical components contain step features whose surface height changes far exceed the optical wavelength. Therefore, this p work presents an interferometer based on variable synthetic wavelength interferometry (VSWI) and differential he
Relation:	MEASUREMENT SCIENCE & TECHNOLOGY
Appears in Collections:	[Department of Optics and Photonics] journal & Dissertation

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