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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35657


    Title: Residual stress in obliquely deposited MgF2 thin films
    Authors: Jaing,Cheng-Chung;Liu,Ming-Chung;Lee,Cheng-Chung;Cho,Wen-Hao;Shen,Wei-Ting;Tang,Chien-Jen;Liao,Bo-Huei
    Contributors: 薄膜技術研究中心
    Keywords: GLANCING-ANGLE DEPOSITION;OPTICAL-PROPERTIES;SURFACE-DIFFUSION;ION ASSISTANCE;COLUMN ANGLE;MICROSTRUCTURE;TEMPERATURE;EVAPORATION;GROWTH;OXIDE
    Date: 2008
    Issue Date: 2010-07-07 15:47:15 (UTC+8)
    Publisher: 中央大學
    Abstract: MgF2 films with a columnar microstructure are obliquely deposited on glass substrates by resistive heating evaporation. The columnar angles of the films increases with the deposition angle. Anisotropic stress does not develop in the films with tilted colu
    Relation: APPLIED OPTICS
    Appears in Collections:[薄膜技術研究中心] 期刊論文

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