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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35661

    Title: In situ sensitive optical monitoring with proper error compensation
    Authors: Lee,Cheng-Chung;Wu,Kai
    Contributors: 薄膜技術研究中心
    Keywords: FILTERS
    Date: 2007
    Issue Date: 2010-07-07 15:47:20 (UTC+8)
    Publisher: 中央大學
    Abstract: We introduce a way to estimate the fluctuation of the refractive index during thin film deposition, through an optical monitor. The thicknesses and error-compensated thickness for each layer are analyzed. A novel monitoring method is thereby derived. The
    Relation: OPTICS LETTERS
    Appears in Collections:[薄膜技術研究中心] 期刊論文

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