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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35684


    Title: Microstructure related properties of lanthanum fluoride films deposited by molybdenum boat evaporation at 193 nm
    Authors: Liu,MC;Lee,CC;Kaneko,M;Nakahira,K;Takano,Y
    Contributors: 薄膜技術研究中心
    Keywords: COATING MATERIALS;OPTICAL COATINGS;THIN-FILMS;ULTRAVIOLET;MGF2;GROWTH;LAF3
    Date: 2005
    Issue Date: 2010-07-07 15:47:54 (UTC+8)
    Publisher: 中央大學
    Abstract: Single layer lanthanum fluoride (LaF3) at 193 nm was deposited by a molybdenum boat evaporation process. Various microstructures that formed under different substrate temperatures and with deposition rates were investigated. The relation between these mic
    Relation: THIN SOLID FILMS
    Appears in Collections:[薄膜技術研究中心] 期刊論文

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