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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35704

    Title: Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane
    Authors: HSU Che-Lung,LIU Yung-Chih,WANG Chih-Ming,WU Mount-Learn,TSAI Ya-Lun,CHOU Yue-Hong,LEE Chien-Chieh,CHANG Jeng-Yang
    Contributors: 光電科學研究中心
    Date: 2006
    Issue Date: 2010-07-07 15:49:23 (UTC+8)
    Publisher: 中央大學
    Abstract: In this paper, a single-layer guided-mode resonance (GMR) filter based on a free-standing silicon-nitride membrane suspended on a silicon substrate is achieved by using bulk-micromachining technology. Both of grating and waveguide structures without a low
    Appears in Collections:[光電科學研究中心] 期刊論文

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