Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution

NCUIR > Engineering College > Graduate Institute of opto-Mechatronics > journal & Dissertation > Item 987654321/36124

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/36124

Title:	Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution
Authors:	Lee,JY;Chen,HY;Hsu,CC;Wu,CC
Contributors:	光機電工程研究所
Keywords:	SENSOR;REFLECTION;ACCURACY;ENCODER
Date:	2007
Issue Date:	2010-07-08 09:43:22 (UTC+8)
Publisher:	中央大學
Abstract:	A novel method for displacement measurement is presented. The measurement system includes a heterodyne light source, a moving grating and a lock-in amplifier for phase measurement. The optical phase variation, which stems from the grating movement, is mea
Relation:	SENSORS AND ACTUATORS A-PHYSICAL
Appears in Collections:	[Graduate Institute of opto-Mechatronics] journal & Dissertation

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