Angular distribution of sputtered particles induced by ion bombardment

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题名:	Angular distribution of sputtered particles induced by ion bombardment
作者:	Lee,CS;Liu,YC;Chen,YH;Lee,S
贡献者:	物理研究所
关键词:	INDUCED PHOTON-EMISSION;INDUCED LIGHT-EMISSION;TARGETS;A1
日期:	2004
上传时间:	2010-07-08 13:30:56 (UTC+8)
出版者:	中央大學
摘要:	Using a 15 keV argon ion beam to impact a polycrystalline aluminum target, the intensities of the sputtered Al particle, and the backscattered projectiles in different angle of incidence were measured. The data showed that the angular distributions of Ar
關聯:	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
显示于类别:	[物理研究所] 期刊論文

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