化學機械研磨研漿注入最佳化研究; Optimization of Slurry Injection During Chemical Mechanical Polishing

NCUIR > Engineering College > Departmant of Mechanical Engineering > Research Project > Item 987654321/39835

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/39835

Title:	化學機械研磨研漿注入最佳化研究;Optimization of Slurry Injection During Chemical Mechanical Polishing
Authors:	周復初
Contributors:	機械工程學系
Keywords:	機械工程類
Date:	2001-07-01
Issue Date:	2010-11-03 10:38:45 (UTC+8)
Publisher:	行政院國家科學委員會
Abstract:	研究領域：8908 ~ 9007
Relation:	財團法人國家實驗研究院科技政策研究與資訊中心
Appears in Collections:	[Departmant of Mechanical Engineering ] Research Project

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