二氧化鈦奈米管結構具有較大的比表面積、較高的表面活性與氣體感測特性，可被應用在光電化學產氫、光伏電池、光觸媒和氣體感測等領域，但大部分研究皆在鈦箔片上製備，使二氧化鈦奈米管應用大受限制。本研究利用射頻磁控濺鍍沉積鈦薄膜於玻璃基材上，放置含有氟化銨、水與乙醇之電解液中，固定50V電壓進行陽極處理製備高度有序之二氧化鈦奈米管結構。在不同陽極處理時間下，觀察陽極處理之電流密度變化、表面與橫截面型態以釐清其生長機制；而電解液中不同的氟化銨與水含量會影響陽極處理過程中電化學蝕刻(場致氧化和場致溶解)與化學溶解作用，受上述共同作用的結果可自組裝生長二氧化鈦奈米管陣列。本研究最佳參數：於1公升乙二醇電解液中，添加3克氟化銨與30克水，可製備出管長最長且高度有序之二氧化鈦奈米管陣列，並製作成光電極，應用在半導體光電化學產氫領域中。 The TiO2 nanotube arrays have large surface area, high surface activity and high sensitivity which are important for many applications such as photoelectron chemical hydrogen generation, photovoltaic cell, photocatalysis and gas sensing. However, most of these arrays have been prepared on Ti foil, which limits potential of TiO2 nanotube applications. In this study titanium films were deposited on a glass substrate using radio frequency (RF) magnetron sputtering and anodized in an electrolyte solution containing NH4F, water and ethylene glycol (EG) to form highly ordered TiO2 nanotubular structures while keeping the anodization potential set at 50 V. The variation of the current density during the anodization process and the surface and cross-section morphologies for different anodization times was used to examine the growth mechanism. The structure of the self-organized TiO2 nanotube array was significantly affected by the NH4F and water contents due to competition between the electrochemical etching (field-assisted oxidation and dissolution) and chemical dissolution of the electrochemical reaction during the anodization process. When the electrolyte was fixed to be 1 L along with the ethylene glycol, the results showed that the longest highly ordered TiO2 nanotube array was grown in the electrolyte with 3 g NH4F and 30 g water, and that is used as a photoelectrode for application in photo-electrochemical hydrogen generation.
