微機電系統技術是目前科技發展的重心，近年來電化學因為可應用在製作微型元件上，所以又受到微加工技術的高度注意，此類的電化學加工被稱為微電化學加工，屬於非傳統加工。其優勢具有可加工任何金屬材料，工件表面無殘留應力，工具電極不易損耗等。在微電化學加工上，若要製作微結構元件，則需要更微細之加工電極，故本文將探討如何製作微細之針錐狀微電極。 本文研究目的為利用電化學加工配合動力拉提法製作針錐微電極，且使用單一因子法分析加工參數(如：操作電壓、電解液濃度、陽極長度、拉提速率、陰極面積、電極旋轉速率)對於製作針錐微電極之影響性，得知當操作電壓和電解液改變時會影響加工表面精度，且陽極浸入長度、拉提速率及電極旋轉速率對於加工微電極成型之錐度與深寬比有重要的影響性，本文在參數範圍內找出一組較合宜之參數。 將直徑510 μm的鎢棒製作成針錐狀電極，其加工時間約為20分鐘，刃長大約3.2 mm，前端針尖之直徑小於15 μm，且錐度極小及深寬比大。且將此針錐狀微電極應用在微電化學工加鑽孔上，其微孔洞之直徑與精度凸顯此針錐微電極在微電化學加工技術的貢獻與突破。 The technology of MEMS has being the main part of current technology. Recently ECM has been applied in micro-components, and it gets high attention from the technology of micro manufacture. This sort of electrochemical machining called EMM belongs to the non-traditional machining. The ECM not only possesses the capability of machining all kinds of metal materials but also remains no residual stress on its surface. More over, the electrode of tool couldn’t easily break. In the process of EMM, to manufacture micro-structures, more tiny micro electrodes are needed in machining. This thesis will intends to investigate the manufacture of a micro conical-shaped electrode. The purpose of this thesis is to use electrochemical machining accompanying with dynamic drawing method to manufacture conical-shaped electrodes. We discussed and analyzed the effect of working parameters, such as applied voltage, electrolyte concentration, anode length, draw up rate, cathode area, rotational rate of electrode, on the conical-shaped electrode. Brief description about the experimental results is needed. A tungsten rod with diameter of 510 μm is need to manufacture the micro conical-shaped electrode. The resulting electrode has edge’s length of 3.2 mm, and the diameter of apex is less than 15 μm. Besides, the cone angle is extremely tiny and the aspect ratio is high. We will use this micro conical-shaped electrode in the EMM drilling, and the resulting micro hole’s diameter and precision shows the potential application of the micro conical-shaped electrode in EMM.
