本論文在探討微陽極導引電鍍法製備單軸鎳鐵合金微柱，於電鍍製程中，改變實驗參數如製程偏壓(4.0V~4.4V)、鍍浴溫度(40℃~55℃)與析鍍間距(10μm~40μm)等條件，對於所得鎳鐵合金微柱表面形貌、機械性質與防蝕特性等之影響。此鎳鐵合金微柱之表面形貌，經由掃描式電子顯微鏡進行觀察比較；其機械性質則藉由微應力拉伸試驗機來測量；至於防蝕特性則將鎳鐵合金微柱浸泡於3.5wt% NaCl水溶液中，藉由電化學試驗比較其腐蝕行為。 結果顯示：較低鍍浴溫度(40℃)與製程偏壓下(4.0V)，和較大的析鍍間距(40μm)製備所得鎳鐵合金微柱之組織均勻細緻、形貌平滑；此鎳鐵合金微柱之機械性質最佳(楊氏係數達162.12GPa)，其對應之直流電極化阻抗測量值最大(2.28×105Ω)，具有最佳之抗蝕性。若鍍液之溫度提高至55℃，或製程偏壓上升至4.4V，微柱之組織均勻度逐漸變差、形貌粗糙化；就機械性質而言，其楊氏係數隨之下降(楊氏係數為23.62GPa)；在NaCl水溶液中之極化阻抗值也隨之下降(8.91×104Ω)，抗蝕性較差。依據析鍍電流量測顯示：在低鍍浴溫度、低製程偏壓下進行微電鍍，其析鍍電流較低且平穩(平均電流為0.875±0.079mA)，析鍍形貌較為平滑(析鍍所得之結構細緻、平滑)，內部結構缺陷較少，因此其機械性質和抗腐蝕性較高。 關鍵字：鎳鐵合金、微陽極導引電鍍、楊氏係數 The effect of operational parameters (including voltage employed, composition of the bath and bath temperature in the micro anode guided electroplating) on the morphology, mechanical property and corrosion behavior of Ni-Fe alloy micro columns was of interest. The surface morphology was examined by scanning electron microscope. The mechanical property was tested by using a micro&nano-scale mechanical testing system to estimate the elastic modulus (Young’s modulus) and the corrosion behavior was evaluated by polarization resistance technique in 3.5 wt% NaCl solution. The results revealed that the micro columns have the smooth surface composed of tiny particles as the deposited from the bath with lower temperature (40℃) under lower voltage employed (4.0V). Their mechanical property was found to be better (with elastic modulus at 162.12GPa) than those (in the range from 106.32GPa to 23.62GPa) fabricated in a bath with higher temperature (i.e. in the range from 40 to 55℃) under higher voltage (in the range from 4.0V to 4.4V). In addition, the corrosion resistance for the micro columns deposited at lower temperature (40℃) and lower voltage (4.0V) is much better (with polarization resistance at 2.28×105Ω) than those (in the range from 1.82×105Ω to to 8.91×104Ω) obtained at higher temperatures (i.e. in the range from 40 to 50℃) and higher voltages (in the range from 4.0V to 4.4V). The variation of the morphology, mechanical property of the micro columns deposited depends upon the voltage, electrode separation and bath temperature those determined by distribution of electric field strength. The micro column appears in smooth surface consisting of tiny particles and dense internal structure. The columns with smooth surface and dense internal were arisen from a uniform, stable and weaker strength of electric field as the deposition taken place in a bath with lower temperature and lower voltage chosen in the electroplating. The micro columns with rough morphology containing, many imperfections in the crystal structure were ascribe to be electrodeposited under non-uniform, less stable and stronger strength of the electric field determined by the deposition conducted in a bath with higher temperature and higher voltages selected. According to the measurement of electroplating current density. When the current density is stable and uniform to maintain at 0.875±0.079mA (electrodeposition at 40℃ and 4.0V), Therefore, a micro columns with smooth morphology and dense internal (containing less imperfections) could be fabricated. Those micro columns revealed better mechanical property and corrosion resistance. Key words：Ni-Fe alloy, micro-anode guide electrodeposition, Young’s modulus
