本研究主要目的為發展一結合即時影像擷取、影像處理及定位控制技術之系統，並將此系統運用在微陽極導引電鍍製程(Micro-Anode Guid Electroplating, MAGE)中，以製備三維複雜形狀之銅金屬微結構物(微米彈簧)，並探討透過控制在微結構物上進行局部電化學反應的表面區域，對沉積之微米銅金屬結構物形貌之影響。 本研究以微陽極導引電鍍製程為基礎增設雙CCD影像監控系統，藉由此系統擷取電化學反應之影像，將影像透過處理定位微陽極及微結構物之位置，以此資訊控制微陽極頭之運動路徑。本研究成果顯示以「即時影像導引連續式微電鍍」系統所製作之微結構表面平整，柱體粗細均勻，且能控制三維微結構物之形貌。 The purpose of this research is to develop an image based positioning controller for the Micro-Anode Guided Electroplating (MAGE) system. It is show by experiments that this controller successfully improves the quality of three-dimensional complex micro-structure planting process. Furthermore, in addition to traditional two dimensional objects, this image guided MAGE system is also with the ability to manufacture complex three-dimensional objects such as stress-less springs.
