本計畫之主旨在將金屬(以銅為例)微電鍍和半導體氧化物(以氧化鋅為例)奈米電鍍等兩種電化學技術結合起來，配合影像控制、電化學電流回饋監控等技術，開發出創新性之微、奈尺度電化學精密混成技術與製造概念。藉由本技術，企圖在幾何形狀複雜之金屬微結構物上，析鍍出奈米氧化物半導體材料，使其具備特殊之功能(氣體感測器或發光二極體)。金屬微電鍍和半導體氧化物奈米電鍍技術為開發此項技術必備之兩大基柱。承蒙國科會多年來之支持，本研究團隊在金屬微電鍍領域，已發展出領先國際水準之微陽極導引電鍍技術；另一方面，由先導實驗證實在銅微柱上已能成功電鍍出奈米氧化鋅。依據此事實，預期本計畫具有極高之可行性。本計畫預定三年期完成，逐年工作依序摘要如下: 第一年: 被覆氧化鋅奈米線之銅微米結構物之製備及其特性研究(以氣體感測器為目標)。第二年: 銅微米結構物表面氧化鋅奈米被覆物之摻雜及其特性研究。第三年: 微米銅/(n-奈米氧化鋅)/(p-奈米氧化鋅)元件之製備其特性研究(以發光二極體為目標)。The aim of this project is to develop an innovative concept and technology of microand nano-fabrication method based on hybrid of the micro-electroplating of metal (e.g., copper) and the nano-electroplating of semi-conductive oxide (e.g., zinc oxide), combined with real-time control of the image and feed-back control of the electrochemical current. By means of this novel technique, we intend to fabricate a composite which is copper microfeature (in sophisticate shape) coated with zinc oxide nanowires to demonstrate specific characters (i.e., capable of gas sensing or light emission). The success in hybrid of micro- and nano-electrochemical technologies in this work is obviously dependent upon the technical availability of the localized electrochemical deposition (LECD) of metal micro-features and electrochemical deposition of oxide nanowires. We are grateful to have being supported by NSC and to have established the microanode guided electroplating (MAGE) patent process leading in the word. In addition, zinc oxide nanowires have been fabricated electrochemically on the copper micro pillars in our preliminary experiment. According to this fact, we are confident to fulfill the project. The annual outlines of the project are as follows： 1. First year: electrochemical process of Cu-microfeatures deposited with ZnO nanowires and their characterization (with an example to demonstrate gas sensing). 2. Second year: doping of metal elements in ZnO nanowires coated on the Cu-microfeatures and the character of the composite. 3. Third year: fabrication of devices based on Cu-microfeature/n-type nano-ZnO/p- type nano-ZnO and their characterization (with an example to demonstrate light emission). 研究期間：10008 ~ 10107
