Enhanced formation and morphological stability of low-resistivity CoSi(2) nanodot arrays on epitaxial Si(0.7)Ge(0.3) virtual substrate

NCU Institutional Repository > 工學院 > 化學工程與材料工程學系 > 期刊論文 > Item 987654321/49937

請使用永久網址來引用或連結此文件: http://ir.lib.ncu.edu.tw/handle/987654321/49937

題名:	Enhanced formation and morphological stability of low-resistivity CoSi(2) nanodot arrays on epitaxial Si(0.7)Ge(0.3) virtual substrate
作者:	Cheng,SL;Yang,CY;Lee,SW;Hsu,HF;Chen,H
貢獻者:	化學工程與材料工程學系
關鍵詞:	NANOSPHERE LITHOGRAPHY;FABRICATION;SILICIDES;CRYSTALS;GROWTH;GATE;NM;CO
日期:	2011
上傳時間:	2012-03-27 16:26:57 (UTC+8)
出版者:	國立中央大學
摘要:	We report here the first successful growth of large-area, low-resistivity cobalt disilicide (CoSi(2)) nanodot arrays on epitaxial (0 0 1)Si(0.7)Ge(0.3) substrates by using the nanosphere lithography (NSL) technique with all interposing amorphous Si (a-Si) thin film serving as the sacrificial layer. For the Co/a-Si bilayer nanodots array on Si(0.7)Ge(0.3) samples after annealing, polycrystalline CoSi(2) appears to form as the only silicide phase at an annealing temperature as low as 500 degrees C The a-Si interlayer with appropriate thickness was found to effectively prevent Ge segregation and maintain the morphological stability in forming CoSi(2) nanodots on Si(0.7)Ge(0.3) substrate. The size, interparticle spacing, and triangular shape of the CoSi(2) nanodots remain almost unchanged even after annealing at 950 degrees C. For the Co/a-Si nanodot samples further annealed at 1000 degrees C, amorphous SiO(x) nanowires, 15-35 nm in diameter, were observed to grow from CoSi(2) nanodot regions. The observed results present the exciting prospect that the NSL technique in conjunction with a sacrificial a-Si interlayer process promises to be applicable in fabricating periodic arrays of other low-resistivity silicide nanocontacts with controlled size, shape, and periodicity on Si(1-x)Ge(x), substrates. (C) 2011 Elsevier B.V. All rights reserved.
關聯:	MATERIALS CHEMISTRY AND PHYSICS
顯示於類別:	[化學工程與材料工程學系 ] 期刊論文

文件中的檔案:

檔案	描述	大小	格式	瀏覽次數
index.html		0Kb	HTML	583	檢視/開啟

在NCUIR中所有的資料項目都受到原著作權保護.

社群 sharing

資料載入中.....