Fabrication of tungsten microelectrodes using pulsed electrochemical machining

NCU Institutional Repository > 工學院 > 機械工程學系 > 期刊論文 > Item 987654321/50086

請使用永久網址來引用或連結此文件: http://ir.lib.ncu.edu.tw/handle/987654321/50086

題名:	Fabrication of tungsten microelectrodes using pulsed electrochemical machining
作者:	Fan,ZW;Hourng,LW;Wang,CY
貢獻者:	機械工程學系
日期:	2010
上傳時間:	2012-03-27 17:03:07 (UTC+8)
出版者:	國立中央大學
摘要:	The manufacture of the micro-structure of MEMS (Micro Electro-Mechanical System) becomes more and more important in recent years. Electrochemical micromachining has many advantages over other machining methods. However, a tiny electrode is needed to manufacture the micro-structures. Accordingly, in this study pulsed electrochemical machining is applied to fabricate a cylindrical microelectrode. The influences of working parameters (such as applied voltage, pulsed period, duty factor and temperature) on the fabrication of the microelectrode are discussed. Results also show that cylindrical tungsten microelectrodes with a diameter of 100 mu m and various lengths can be fabricated by a linear decay of applied voltage or duty factor. (C) 2010 Elsevier Inc. All rights reserved.
關聯:	PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
顯示於類別:	[機械工程學系] 期刊論文

文件中的檔案:

檔案	描述	大小	格式	瀏覽次數
index.html		0Kb	HTML	393	檢視/開啟

在NCUIR中所有的資料項目都受到原著作權保護.

社群 sharing