Fabry-Perot interferometer utilized for displacement measurement in a large measuring range

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題名:	Fabry-Perot interferometer utilized for displacement measurement in a large measuring range
作者:	Wang,YC;Shyu,LH;Chang,CP
貢獻者:	機械工程學系
關鍵詞:	SENSORS
日期:	2010
上傳時間:	2012-03-27 17:03:10 (UTC+8)
出版者:	國立中央大學
摘要:	The optical configuration of a Fabry-Peacuterot interferometer is uncomplicated. This has already been applied in different measurement systems. For the displacement measurement with the Fabry-Peacuterot interferometer, the result is significantly influenced by the tilt angles of the measurement mirror in the interferometer. Hence, only for the rather small measuring range, the Fabry-Peacuterot interferometer is available. The goal of this investigation is to enhance the measuring range of Fabry-Peacuterot interferometer by compensating the tilt angles. To verify the measuring characteristic of the self-developed Fabry-Peacuterot interferometer, some comparison measurements with a reference standard have been performed. The maximum deviation of comparison experiments is less than 0.3 mu m in the traveling range of 30 mm. The experimental results show that the Fabry-Peacuterot interferometer is highly stable, insensitive to environment effects, and can meet the measuring requirement of the submicrometer order. (c) 2010 American Institute of Physics. [doi:10.1063/1.3480551]
關聯:	REVIEW OF SCIENTIFIC INSTRUMENTS
顯示於類別:	[機械工程學系] 期刊論文

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