Quasi-common-optical-path heterodyne grating interferometer for displacement measurement

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题名:	Quasi-common-optical-path heterodyne grating interferometer for displacement measurement
作者:	Hsieh,HL;Lee,JY;Wu,WT;Chen,JC;Deturche,R;Lerondel,G
贡献者:	機械工程學系
关键词:	SURFACE-PLASMON RESONANCE;MEASUREMENT SYSTEM;NONLINEARITY;LASER;FABRICATION;RANGE
日期:	2010
上传时间:	2012-03-27 17:04:22 (UTC+8)
出版者:	國立中央大學
摘要:	A novel heterodyne grating interferometer based on a quasi-common-optical-path design is proposed for displacement measurement. The quasi-common-optical-path design relies on the phase shift between the zeroth and first diffraction grating orders which have been rotated in polarization using a half-wave plate. We achieved a measurement resolution better than 3 nm with a system stability of less than 14 nm over 1 h. We discussed the performances of the system addressing the effect of dominant errors, namely grating pitch, frequency mixing, polarization mixing and polarization-frequency mixing. While the theoretically quasi-common-optical-path heterodyne grating system allows for sub-nanometer resolution, we found that the measurement resolution here is limited by the displacement stage. Relying on heterodyne interferometric phase measurement combined with quasi-common-optical configuration, the proposed and demonstrated method has the advantages of high measurement resolution, relatively straightforward operation and high stability.
關聯:	MEASUREMENT SCIENCE & TECHNOLOGY
显示于类别:	[機械工程學系] 期刊論文

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