Effects of bias on properties of Ti-C:H films coated by filtered cathodic vacuum arc

NCUIR > Engineering College > Departmant of Mechanical Engineering > journal & Dissertation > Item 987654321/50218

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/50218

Title:	Effects of bias on properties of Ti-C:H films coated by filtered cathodic vacuum arc
Authors:	Lee,S;Chu,CL;Gwo,J;Huang,JJ;Tsai,MJ;Wang,SM
Contributors:	機械工程學系
Keywords:	DIAMOND-LIKE CARBON;DLC FILMS;MECHANICAL-PROPERTIES;ION-IMPLANTATION;DEPOSITION;BEHAVIOR;STEEL
Date:	2011
Issue Date:	2012-03-27 17:06:46 (UTC+8)
Publisher:	國立中央大學
Abstract:	A bias voltage apparatus is attached to the filtered cathode vacuum arc system for coating a diamond-like film containing Ti on WC substrate. Ti, which acts as the cathode target, is sputtered by plasma, and reacts with C(2)H(2) gas, then deposits on the WC under working conditions of 60 A current and voltage between -50 and -275 V. Such processed diamond-like film containing Ti(Ti-C:H) is analysed by glow discharge spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy and nanoindentation for determining Ti concentration, crystallographic structure, bonding mode and mechanical properties. Characteristic parameters are determined to obtain suitable properties, and the underlying reasons are also addressed.
Relation:	SURFACE ENGINEERING
Appears in Collections:	[Departmant of Mechanical Engineering ] journal & Dissertation

Files in This Item:

File	Description	Size	Format
index.html		0Kb	HTML	363	View/Open

社群 sharing