Effects of post-annealing on the structural and nanomechanical properties of Ga-doped ZnO thin films deposited on glass substrate by rf-magnetron sputtering

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题名:	Effects of post-annealing on the structural and nanomechanical properties of Ga-doped ZnO thin films deposited on glass substrate by rf-magnetron sputtering
作者:	Wang,SK;Lin,TC;Jian,SR;Juang,JY;Jang,JSC;Tseng,JY
贡献者:	機械工程學系
关键词:	ZINC-OXIDE FILMS;MECHANICAL-PROPERTIES;ANNEALING TEMPERATURE;OPTICAL-PROPERTIES;NANOINDENTATION;TRANSPARENT;DEFORMATION;RESPONSES;SAPPHIRE;BEHAVIOR
日期:	2011
上传时间:	2012-03-27 17:06:51 (UTC+8)
出版者:	國立中央大學
摘要:	In this study, the effects of post-annealing on the structure, surface morphology and nanomechanical properties of ZnO thin films doped with a nominal concentration of 3 at.% Ga (ZnO:Ga) are investigated using X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM) and nanoindentation techniques. The ZnO:Ga thin films were deposited on the glass substrates at room temperature by radio frequency magnetron sputtering. Results revealed that the as-deposited ZnO:Ga thin films were polycrystalline albeit the low deposition temperature. Post-annealing carried out at 300, 400 and 500 degrees C, respectively, has resulted in progressive increase in both the average grain size and the surface roughness of the ZnO:Ga thin film, in addition to the improved thin films crystallinity. Moreover, the hardness and Young's modulus of ZnO:Ga thin films are measured by a Berkovich nanoindenter operated with the continuous contact stiffness measurements (CSM) option. The hardness and Young's modulus of ZnO:Ga thin films increased as the annealing temperature increased from 300 to 500 degrees C, with the best results being obtained at 500 degrees C. (C) 2011 Elsevier B.V. All rights reserved.
關聯:	APPLIED SURFACE SCIENCE
显示于类别:	[機械工程學系] 期刊論文

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