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    請使用永久網址來引用或連結此文件: http://ir.lib.ncu.edu.tw/handle/987654321/50262


    題名: Simulation and Correction of Angular Defects in Two-Photon Lithography
    作者: Lin,CT;Fan,H;Bouriau,M;Liao,CY;Lin,CL;Masclet,C;Leon,JC;Chung,TT;Baldeck,PL
    貢獻者: 機械工程學系
    關鍵詞: POLYMERIZATION;MICROFABRICATION;FABRICATION
    日期: 2011
    上傳時間: 2012-03-27 17:07:58 (UTC+8)
    出版者: 國立中央大學
    摘要: In two-photon lithography a high repetition rate laser scans through calculated trajectories in order to induce polymerization in the resin which give rise to complex microstructures. When there are sharp angles within trajectories, the polymerized resin at angles receives more energy from the laser. The polymerized structure becomes larger, and the produced shape gets over-exposure defects. Here we have modeled over exposure defects using numerical simulations and suggested an analytical expression to calculate the correcting coefficients for adjusting laser power. We have demonstrated over exposure defect of free angular structures using this laser power correction.
    關聯: JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
    顯示於類別:[機械工程學系] 期刊論文

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