Structures and photocatalytic behavior of tantalum-oxynitride thin films

NCU Institutional Repository > 工學院 > 機械工程學系 > 期刊論文 > Item 987654321/50263

jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://ir.lib.ncu.edu.tw/handle/987654321/50263

题名:	Structures and photocatalytic behavior of tantalum-oxynitride thin films
作者:	Hsieh,JH;Li,C;Liang,HC
贡献者:	機械工程學系
关键词:	OPTICAL-PROPERTIES;ELECTRONIC-STRUCTURE;NIOBIUM FILMS;TAON;TA3N5;NITRIDATION;OXIDATION
日期:	2011
上传时间:	2012-03-27 17:08:00 (UTC+8)
出版者:	國立中央大學
摘要:	Tantalum oxynitride films were created by direct nitridation/oxidation during rapid thermal annealing at temperatures 450-700 degrees C. Instead of during deposition, this post process may be proved to be an alternative way to make transition metallic oxynitride films. With sufficient supply of oxygen flow (>= 30 sccm), TaO(x)N(y) was formed as examined from X-ray diffraction (XRD) analysis. This oxynitride film has a broad optical absorption over the range of visible light and sufficient photocatalytic function. For optical absorption, the films' transmittance and reflectance were measured by a UV-VIS-NIR spectrophotometer with wavelengths ranging from 300 to 900 nm. The broad visible light absorption is associated with the formation of band gap in TaO(x)N(y) film, which was examined by the theoretical calculations combining the Beer-Lambert law and Tauc formula. lastly, the photocatalysis of TaO(x)N(y) was gauged by the photodegradation test which measured the reduction of light absorbance affected by the decomposition of methylene blue (C(16)H(18)N(3)SCl center dot 3H(2)O) on TaO(x)N(y) under visible light irradiation. (C) 2011 Published by Elsevier B.V.
關聯:	THIN SOLID FILMS
显示于类别:	[機械工程學系] 期刊論文

文件中的档案:

档案	描述	大小	格式	浏览次数
index.html		0Kb	HTML	313	检视/开启

在NCUIR中所有的数据项都受到原著作权保护.

社群 sharing

数据加载中.....