Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer

NCUIR > Engineering College > Departmant of Mechanical Engineering > journal & Dissertation > Item 987654321/50274

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/50274

Title:	Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer
Authors:	Hsieh,HL;Chen,JC;Lerondel,G;Lee,JY
Contributors:	機械工程學系
Keywords:	ENCODERS
Date:	2011
Issue Date:	2012-03-27 17:08:17 (UTC+8)
Publisher:	國立中央大學
Abstract:	A method based on a specific quasi-common-optical-path (QCOP) configuration for two-dimensional displacement measurement is presented. The measurement system consists of a heterodyne light source, two-dimensional holographic grating, specially designed set of half wave plates, and lock-in amplifiers. Two measurement configurations, for single and differential detection, are designed. The sensitivity, resolution and nonlinear phase error of the differential detection type are better than those of the single detection type. The experimental results demonstrate that the QCOP interferometer has the ability to measure two-dimensional displacement while maintaining high system stability. (C) 2011 Optical Society of America
Relation:	OPTICS EXPRESS
Appears in Collections:	[Departmant of Mechanical Engineering ] journal & Dissertation

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