Microstructure and optical properties of Al(2)O(3) prepared by oblique deposition using microsphere shell templates

NCU Institutional Repository > 研究中心 > 薄膜技術研究中心 > 期刊論文 > Item 987654321/50652

jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://ir.lib.ncu.edu.tw/handle/987654321/50652

题名:	Microstructure and optical properties of Al(2)O(3) prepared by oblique deposition using microsphere shell templates
作者:	Cho,WH;Lee,CT;Yu,CC;Kei,CC;Liu,DR;Lee,CC
贡献者:	薄膜技術中心
关键词:	GLANCING-ANGLE DEPOSITION;THIN-FILMS;NANOSPHERE LITHOGRAPHY;HUMIDITY SENSORS;FABRICATION;INDEX;ARRAY
日期:	2011
上传时间:	2012-03-27 17:50:17 (UTC+8)
出版者:	國立中央大學
摘要:	We fabricated an orderly inclined Al(2)O(3) column array using a hollow microsphere template. The microstructure and optical properties were investigated with scanning electron micrography and a UV/VIS spectrometer, respectively. Microsphere shell templates were formed using atomic layer deposition to prevent the melting of polystyrene microspheres during the following high-temperature deposition process. An inclined Al(2)O(3) column array with a 30 degrees tilt angle was grown by oblique deposition on a substrate with a 75.5 degrees tilt angle with respect to the substrate normal. Birefringence and photonic crystalline behavior can be observed in the orderly inclined column array. The difference in the refractive indices between the p and s polarizations of the orderly inclined Al(2)O(3) column array was about 0.1. The photonic properties of the crystal were enhanced compared to those of substrates without patterns. (C) 2011 Optical Society of America
關聯:	APPLIED OPTICS
显示于类别:	[薄膜技術研究中心] 期刊論文

文件中的档案:

档案	描述	大小	格式	浏览次数
index.html		0Kb	HTML	1285	检视/开启

在NCUIR中所有的数据项都受到原著作权保护.

社群 sharing