Narrow Bandstop Filters with Wide and Flattened Sidebands Using Silicon-Based and Suspended Membrane Type of Guided-Mode Resonance Structures

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/50991

Title:	Narrow Bandstop Filters with Wide and Flattened Sidebands Using Silicon-Based and Suspended Membrane Type of Guided-Mode Resonance Structures
Authors:	Chang,CC;Lan,HC;Hsiao,HL;Jheng,JW;Lu,IC;Lee,YC;Wu,ML
Contributors:	光電科學與工程學系
Keywords:	DESIGN
Date:	2010
Issue Date:	2012-03-27 18:14:50 (UTC+8)
Publisher:	國立中央大學
Abstract:	In this paper, the simple two-layer silicon-based and suspended-membrane-type guided-mode resonance (GMR) filter with a narrow bandstop spectrum as well as wide and flattened sidebands is experimentally demonstrated. The proposed filter based on a free-standing silicon nitride membrane suspended on a silicon substrate is realized by using the anisotropic wet etching to remove the substrate beneath the silicon nitride layer. Both of grating and waveguide structures are fabricated simultaneously on a silicon nitride membrane. Moreover, the silicon dioxide membrane playing a role on modifying the spectral response of proposed GMR filter is deposited beneath the free-standing silicon nitride layer. The resonance wavelength of proposed band-stop filter is controlled at 1580.6 nm with a bandwidth less than 0.92 nm, measured in full-width at half-maximum (FWHM). The improved spectral performance including the sideband can be extended to be 415 nm with the maximum transmittance greater than 93%. (C) 2010 The Japan Society of Applied Physics
Relation:	JAPANESE JOURNAL OF APPLIED PHYSICS
Appears in Collections:	[Department of Optics and Photonics] journal & Dissertation

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