English  |  正體中文  |  简体中文  |  Items with full text/Total items : 66984/66984 (100%)
Visitors : 23055367      Online Users : 189
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version


    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/51000


    Title: Reduction of residual stress in optical silicon nitcide thin films prepared by radio-frequency ion beam sputtering deposition
    Authors: Lee,CC;Lee,KH;Tang,CJ;Jaing,CC;Chen,HC
    Contributors: 光電科學與工程學系
    Keywords: NITRIDE FILMS;COATINGS;TEMPERATURE;BOMBARDMENT;MAGNETRON
    Date: 2010
    Issue Date: 2012-03-27 18:15:11 (UTC+8)
    Publisher: 國立中央大學
    Abstract: In this study, we investigate the deposition of SiN(x) thin films by radio-frequency ion-beam sputtering deposition. By varying the amount of N(2) and Ar flow and ion-beam voltage, we can obtain an optimal refractive index of 2.07, extinction coefficient (at the central wavelength of 500 nm) of 3.44 x 10(-4), and deposition rate of 0.166 nm/s. The x-ray photoelectron spectra of SiN(x) films deposited with different beam voltages are also analyzed. The residual stress of the SiN(x) films varied from -1.38 to -2.17 GPa, depending on the beam voltage. The residual stress is reduced from -2.17 to -1.40 GPa when the film is divided into four layers with three interfaces. (C) 2010 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3456708]
    Relation: OPTICAL ENGINEERING
    Appears in Collections:[光電科學與工程學系] 期刊論文

    Files in This Item:

    File Description SizeFormat
    index.html0KbHTML508View/Open


    All items in NCUIR are protected by copyright, with all rights reserved.

    社群 sharing

    ::: Copyright National Central University. | 國立中央大學圖書館版權所有 | 收藏本站 | 設為首頁 | 最佳瀏覽畫面: 1024*768 | 建站日期:8-24-2009 :::
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback  - 隱私權政策聲明