English  |  正體中文  |  简体中文  |  Items with full text/Total items : 69561/69561 (100%)
Visitors : 23083987      Online Users : 363
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version


    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/51018


    Title: Characterization of Silicon Oxide Films Deposited from a Permanent-Magnet Helicon Plasma Source
    Authors: Jan,DJ;Tang,CY;Ai,CF
    Contributors: 光電科學與工程學系
    Keywords: CHEMICAL-VAPOR-DEPOSITION;FUNCTIONAL COATINGS;THIN-FILMS;HEXAMETHYLDISILOXANE;SIO2-FILMS;SIO2;DIOXIDE;REACTOR;CVD
    Date: 2011
    Issue Date: 2012-03-27 18:15:39 (UTC+8)
    Publisher: 國立中央大學
    Abstract: Silicon oxide films were deposited by an individual PM helicon source using HMDSO as a precursor and N(2)O as the reactive gas at low temperature. The chemical structure and elemental composition of the films are characterized by Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy, and the optical and mechanical properties of the films are evaluated by a thin-film metrology system using reflectance spectra and a nanoindenter. The experimental results show that the N(2)O ratio in the plasma has a strong impact on the optical and structural characteristics of the deposited films: with increasing N(2)O flow ratios, the hardness of the deposited films increases while the deposition rate and carbon content decreases. At the same time, the characteristics of the oxide films gradually shift away from those of polymers towards those of SiO(2) The technique presented here may find applications in making barrier films for polymer substrates.
    Relation: PLASMA PROCESSES AND POLYMERS
    Appears in Collections:[光電科學與工程學系] 期刊論文

    Files in This Item:

    File Description SizeFormat
    index.html0KbHTML531View/Open


    All items in NCUIR are protected by copyright, with all rights reserved.

    社群 sharing

    ::: Copyright National Central University. | 國立中央大學圖書館版權所有 | 收藏本站 | 設為首頁 | 最佳瀏覽畫面: 1024*768 | 建站日期:8-24-2009 :::
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback  - 隱私權政策聲明