Effect of thermal annealing on the optical properties and residual stress of graded-index-like films deposited by radio-frequency ion-beam sputtering

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题名:	Effect of thermal annealing on the optical properties and residual stress of graded-index-like films deposited by radio-frequency ion-beam sputtering
作者:	Tang,CJ;Jaing,CC;Lee,KH;Lee,CC
贡献者:	光電科學與工程學系
关键词:	RUGATE FILTERS;THIN-FILMS;COATINGS
日期:	2011
上传时间:	2012-03-27 18:15:57 (UTC+8)
出版者:	國立中央大學
摘要:	Composite films of Ta-Si oxide and graded-index-like films have been realized by using radio-frequency ion-beam sputtering. The influence of thermal annealing on the optical properties and residual stress of single-layer composite films and graded-index-like films has been studied. The residual stress and optical properties of both types of films were more stable than that of the notch filters fabricated from a series of discrete quarter-wave layers made by alternatively stacking high and low index materials after annealing. (C) 2010 Optical Society of America
關聯:	APPLIED OPTICS
显示于类别:	[光電科學與工程學系] 期刊論文

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