Comparative study of physical properties of vapor chopped and nonchopped Al(2)O(3) thin films

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題名:	Comparative study of physical properties of vapor chopped and nonchopped Al(2)O(3) thin films
作者:	Tamboli,SH;Puri,V;Puri,RK;Patil,RB;Luo,MF
貢獻者:	物理學系
關鍵詞:	SPRAY-PYROLYSIS;EVAPORATION;ADHESION;STRESS
日期:	2011
上傳時間:	2012-06-11 10:48:10 (UTC+8)
出版者:	國立中央大學
摘要:	Aluminium oxide being environmentally stable and having high transmittance is an interesting material for optoelectronics devices. Aluminium oxide thin films have been successfully deposited by hot water oxidation of vacuum evaporated aluminium thin films. The surface morphology, surface roughness, optical transmission, band gap, refractive index and intrinsic stress of Al(2)O(3) thin films were studied. The cost effective vapor chopping technique was used. It was observed that, optical transmittance of vapor chopped Al(2)O(3) thin film showed higher transmittance than the nonchopped film. The optical band gap of vapor chopped thin film was higher than the nonchopped Al(2)O(3), whereas surface roughness and refractive index were lower due to vapor chopping. (C) 2011 Elsevier Ltd. All rights reserved.
關聯:	MATERIALS RESEARCH BULLETIN
顯示於類別:	[物理學系] 期刊論文

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