本研究利用射頻磁控共濺鍍系統，製備鋁摻雜與鐵鋁共摻雜氧化鋅透明導電薄膜於玻璃基板上。藉由改變鋁靶的射頻功率以獲得四種不同鋁摻雜量的氧化鋅薄膜；利用改變鐵靶的直流功率，製備出四種不同鐵摻雜量的薄膜。靶材功率越大，摻雜量越高，薄膜的晶粒大小與表面粗糙度都會增加；鋁摻雜含量增加時，薄膜的電阻率會下降；但鐵含量增加時，薄膜的電阻率卻呈現上升的趨勢。薄膜皆具有纖維鋅礦的(002)優選結晶方向，當鋁摻雜量增加時，(002)的波峰強度會增強；於鐵鋁共摻雜氧化鋅薄膜中，鐵摻雜量增加，(002)波峰位置會往低繞射角偏移且強度也會減弱。 ZnO:Al(3.52 at.%)的透光性最佳可達93%；鐵鋁共摻雜薄膜的透光性會因為鐵摻雜量的增加而降低。鋁摻雜量增加時，薄膜的能隙值會上升，薄膜的功函數值會由4.7降低至4.5 eV；鐵摻雜量增加時，鐵鋁共摻雜氧化鋅薄膜的能隙值反而降低，但功函數則增加。利用X光光電子能譜儀分析可知薄膜中元素的化學組態為Zn2+、Al3+、Fe2+與Fe3+，但鐵摻雜量為9.50 at.%時，會出現金屬態的鐵(Fe0)。磁滯曲線量測結果則顯示，薄膜中的鐵摻雜量增加，會使鐵鋁共摻雜氧化鋅薄膜的感應磁通量增加，呈現順磁特性。Al-doped ZnO and Fe, Al co-doped ZnO films were prepared on a glass substrate using a magnetron co-sputtering system with a zinc oxide target, a metallic aluminum target sputtered using radio frequency power, and a metallic iron target sputtered using direct current power. The Al-dopant and Fe-dopant concentration of the AZO films increased with increasing the power. The surface roughness of the films increased with increasing Al-content and Fe-content in both AZO and FAZO films. The average grain size of AZO and FAZO films increased with Al-content and Fe-content increased. Analysis of the films using grazing incidence X-ray diffractometer indicated that all films had a wurtzite structure with a texture of (002). A similar result of XRD with FAZO films, but the peak of (002) shifted as Fe-content increasing. The texture of Fe (110) was presence as Fe-dopant increasing to 9.50 at.%. The optimal average transmittance in visible region of the AZO films indicated in ZnO:Al (3.52 at.%). The average transmittance of FAZO films decreasing with Fe-content increasing. The band gap of the AZO films increased as Al-content increasing, but a reverse trendency of the FAZO films. UPS analysis revealed that the work function of the AZO films decreased with Al-content increased; however, the work function of the FAZO films was increased with Fe-content increased. The chemical composition of the films was analyzed by XPS, and revealed that Zn2+, Al3+, Fe2+, and Fe3+ chemical state. As the Fe-content increasing to 9.50 at.%, the Fe0 structure was presence of the FAZO film. Increasing the concentration of Fe-content, the FAZO films exhibited paramagnetic properties.
