在本篇論文採用橢圓儀的量測技術，發展出兩套皆可量測扭轉向列型液晶TNLC二維影像參數的光學系統，分別為強度敏感式影像橢圓儀與單通道式影像橢圓儀，利用基本的P-S-A架構並藉由旋轉四分之一波片量測扭轉向列型液晶，並且此二者皆具實現即時影像量測的能力。透過數值擬合的運算方式，並結合Yeh與Gu和Lien所推導出的兩種TNLC物理模型，我們可以同時量到TNLC的五種參數，包含：厚度、預傾角、扭轉角、配向角與非扭轉相位延遲。最後，我們對此兩種光學系統所得到的TNLC參數進行比較。實驗結果顯示強度敏感式影像橢圓儀提供了較高的量測精度，而單通道式影像橢圓儀有架設簡單與量測過程簡便的優勢。In this thesis, we propose that both the intensity sensitive imaging ellipsometer and single channel imaging ellipsometer can two-dimensionally measure the parameters of the twisted nematic liquid crystal (TNLC) cell by using a polarizer-sample-analyzer ellipsometric configuration with a rotating quarter wave plate (QWP). Both of them have ability to achieve the real-time measurement. The five characteristic parameters, including cell gap, pretilt angle, rubbing angle, twist angle and untwisted phase retardation can be measured simultaneously by numerical curve fitting two different physical model of a TNLCD, which are derived by Lien, and Yeh and Gu. Finally, we compare two sets of TN-LC parameters obtaining from these two developed optical system setup. The experimental result shows that the intensity sensitive imaging ellipsometer can provide higher measurement accuracy, while the single channel imaging ellipsometer takes advantage on the easy to set up and less measurement process.
