本文主要研究對象為遙測取像儀之反射鏡加工與裝配，旨在探討加工與裝配對反射鏡光學品質之影響。加工缺陷檢測主要以殘留應力與次表層破壞為主，本研究利用不同粒徑之鑽石刀具，分別在試片上研磨，再以不同儀器觀察表面之殘留應力與次表層破壞，得到刀具粒徑對此兩種加工缺陷之影響。一般光學分析流程中，不易計入運動學裝配與鏡片變形所降低的光學品質，本研究建立一套光機分析流程，整合有限元素與曲面擬合方法，能將主鏡受力產生之變形匯入光學軟體進行分析，模擬實際運作情況下之光學品質。利用此一流程，分析運動學裝配貼合位置對主鏡光學品質之影響，並找出具最佳品質之貼合位置；另外，此流程亦搭配田口法進一步改良裝配參數，使其對主鏡成像影響能降至最低。This study investigates the effect of machining defects and the optimum mounting on a primary mirror of a remote sensing instrument. Processing defects discussed here are residual stress and subsurface damage. The specimens are ground by diamond tools with different grain-sized, and the effects of grain size of the grinding tool on the residual stress and subsurface damage are investigated.Generally, optical simulation process does not consider the degraded optical performance caused by the deformations of mounting and mirror. This research established an opto-mechanical analysis process to integrate finite element analysis and surface fitting. After fitting, the data of the deformed primary mirror can be imported into optical simulation software to analyze its real optical performance. Based on the integrated opto-mechanical analysis, the best position to glue the kinematic mount and the primary mirror is determined. Furthermore, Taguchi method is adopted to determine the design parameters of the kinematic mount for the primary mirror which will yield a best optical performance.
