新穎太陽能電池基板表面粗糙化結構之研究

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Title:	新穎太陽能電池基板表面粗糙化結構之研究
Authors:	鍾承軒;Chung,Cheng-hsuan
Contributors:	化學工程與材料工程學系
Keywords:	化學濕式蝕刻;太陽能電池;表面粗糙化;鋁摻雜氧化鋅薄膜;Chemical etching;Solar cell;Surface textured;ZnO:Al thin film
Date:	2013-01-30
Issue Date:	2013-03-25 15:51:20 (UTC+8)
Publisher:	國立中央大學
Abstract:	本研究利用一簡單容易且快速有效的方法，以化學溶液蝕刻法在噴砂之玻璃與矽晶基板上，製備表面粗糙化結構。在表面粗糙化之玻璃基板實驗中，噴砂玻璃在初始蝕刻時，其光穿透率會先下降，而後光穿透率會隨著蝕刻時間增加而上升，光散射率則是開始蝕刻後便開始上升，蝕刻至8分鐘達最高值。在本研究中，蝕刻8分鐘之表面粗糙化玻璃基板具備平均光穿透92.5 %、平均光散射63.3 %且霧度達68.4 %之光學性質。此外，鍍製ZnO:Al透明導電薄膜在表面粗糙化結構的玻璃基板上，與未鍍製ZnO:Al薄膜之表面粗糙化玻璃，在光學性質上具有相同之趨勢。經由噴砂處理與化學溶液蝕刻製備之表面粗糙化結構矽晶基板，其反射率下降幅度相當顯著；進一步調變蝕刻時間，將矽晶基材蝕刻成碗狀之表面粗糙化結構，在400-800 nm波長範圍內，平均光反射率可從24 %降低至不到2 %。本研究所提出之製程可製備出具抗反射效果之碗狀結構矽晶基板，且在高效能矽基太陽能電池的應用上有非常大的發展潛力。In this study, we propose a facile and efficient method to produce textured surfaces on glass and silicon substrates, which is based on the sandblasting with a wet etching technique. The transmittance of the textured glass was found to decrease with etching time first then increase. The intensity of light scattering from the textured glass was increased with etching time, and reached the maximum value at the etching time of 8 min. The transmittance, scattering, and haze values of the textured glass substrate after etching at 8 min were measured to be about 92.5 %, 63.3 %, and 68.4 %, respectively. In addition, the optical properties of the textured glass substrates after depositing ZnO:Al thin films show the same trend as these textured glass substrates.After appropriate sandblasting and wet etching treatments, the optical reflectance of the textured silicon substrates can be significantly reduced. By adjusting the etching time, the average reflectance measured in the wavelength range of 400 to 800 nm for the bowl-like textured Si substrates can be gradually decreased from 24 % to less than 2 %. Therefore, the process proposed in the study and the bowl-like antireflection structures produced may have potential applications in high-efficiency Si-based solar cells.
Appears in Collections:	[National Central University Department of Chemical & Materials Engineering] Electronic Thesis & Dissertation

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