本研究為探討利用溶膠凝膠法,藉由鋁及錫在氧化鋅的共摻雜,製作出新穎的透明導電薄膜。 薄膜的微結構、組成、光電及化學性質在本研究中將被深入討論。溶膠凝膠法被認為是製備薄膜並頗受注目的技術之一,因此學生可從中了解以浸鍍(dip‐coating)法配置前驅物溶液及一連續的步驟製備出所需的薄膜。 此外,也可學習X‐Ray 繞射、掃描式電子顯微鏡等儀器進一步探討薄膜的晶體結構以及表面形貌。The goal of this Master Research would be concentrated on the fabrication of a new transparent conductivethin films of zinc oxide co-doped with Al and Sn by sol-gel method. The micro-structure,composition, optical, electrical properties and chemical properties of these films will be investigated.The sol-gel method is one of the most popular techniques to prepare thin solid films so that the studentmay learn the skill how he could prepare the thin films from the precursor solutions through a sequenceof procedures such as dip-coating and heat treatment on a glass substrate. In addition, he will conductthe instrumental analysis such x-ray diffraction, scanning electron microscopy to examine the crystalstructure and surface morphology. Finally, he will learn how to characterize the films.