摘要 ITO陽極的處理與修飾方式是決定高分子發光二極體[PLED (Polymer Light Emitting-Diodes)] 元件效能的重要因素之一，我們利用CITS這項技術來探討不同清洗方式對ITO表面粗糙度與導電均勻度的影響。而導電聚苯胺的導電特性在文獻報導中有互相矛盾的地方，原因可能是不同合成方法所得聚苯胺的細部導電度不同所造成的。AFM-CITS探討發現聚苯胺膜表面電流密度的差異，與膜本身的高低起伏無關，而是源自於聚苯胺本身的導電度。然而直接聚合在不同方式處理後的ITO上的聚苯胺膜與使用不同摻雜質(鹽酸、樟腦磺酸) 摻雜所得之摻雜態聚苯胺膜的堆疊與形狀很類似，但是導電均勻度不一樣；沈積在經苯胺矽烷分子修飾過的ITO載體上之樟腦磺酸摻雜的聚苯胺膜，皆具有好的導電均勻性。而由水溶液中製得之各種水溶性聚苯胺(PSA、PAPSA)膜，其表面型態與直接聚合的聚苯胺不一樣，其導電度雖然比聚苯胺膜差，但導電均勻度比聚苯胺膜好。 Abstract The current image tunneling spectroscopy (CITS) has been used to measure the scanning tunneling spectroscopy (STS) of the sample surface, in which the surface conductivity can be illustrated. The surface treatment and modification of ITO anode have a large impact on the performance of PLED devices. ITO was cleaned with various methods. The cleaned ITO was then treated with a monolayer of organic silane via molecular self-adsorption. On top of cleaned or silane modified ITO, a layer of polyaniline film was deposited via in-situ polymerization/deposition. CITS was used to study the conducting homogeneity of ITO and polyaniline films. It was found that the conductivity of ITO films is very homogeneous. Their surface morphology and CITS image have a point-to-point corresponding. Nevertheless, the topographies of polyaniline films are different from their CITS images. The morphology of all polyaniline films studied revealed a spheric aggregation. On the other hand, the CITS images of polyaniline films showed conducting islands with various sizes of conducting domain.