研究期間：10108~10207;The aim of this project is to develop an innovative concept and technology of microand nano-fabrication method based on hybrid of the micro-electroplating of metal (e.g., copper) and the nano-electroplating of semi-conductive oxide (e.g., zinc oxide), combined with real-time control of the image and feed-back control of the electrochemical current. By means of this novel technique, we intend to fabricate a composite which is copper microfeature (in sophisticate shape) coated with zinc oxide nanowires to demonstrate specific characters (i.e., capable of gas sensing or light emission). The success in hybrid of micro- and nano-electrochemical technologies in this work is obviously dependent upon the technical availability of the localized electrochemical deposition (LECD) of metal micro-features and electrochemical deposition of oxide nanowires. We are grateful to have being supported by NSC and to have established the microanode guided electroplating (MAGE) patent process leading in the word. In addition, zinc oxide nanowires have been fabricated electrochemically on the copper micro pillars in our preliminary experiment. According to this fact, we are confident to fulfill the project. The annual outlines of the project are as follows： 1. First year: electrochemical process of Cu-microfeatures deposited with ZnO nanowires and their characterization (with an example to demonstrate gas sensing). 2. Second year: doping of metal elements in ZnO nanowires coated on the Cu-microfeatures and the character of the composite. 3. Third year: fabrication of devices based on Cu-microfeature/n-type nano-ZnO/p- type nano-ZnO and their characterization (with an example to demonstrate light emission).
