研究期間：10108~10207;The objective of this study is to develop a high performance intelligent control system for the PC-based piezo-flexural nanopositioning stage (PFNS) have been widely utilized in the industries for many applications such as high-density semiconductors, scanning probe microscopy, and micro electromechanical systems (MEMS), etc. At the first year of this project, we presents a piezoelectric actuator amplifier circuit design which uses a piezoelectric equivalent circuit model and charging feedback circuit mode to analyze and experiment. At the second year, using LuGre hysteresis friction model and Mechanical model to derive the dynamic model of the PFNS and an idea controller is designed. Due to the hysteresis friction model parameters and dynamic model of the PFNS is unknown, we proposed Functional Link Radial Basis Function Network with Asymmetric Membership Function (FLRBFN-AMF) controller to estimate the lumped uncertainty including the parameter variations and external disturbance of the system directly.At the third year is to develop an intelligent Nonsingular Terminal Sliding-Mode Controller (INTSMC) for a piezo-flexural nanopositioning stage (PFNS) to estimate the lumped uncertainty including the parameter variations and external disturbance of the system directly. A personal computer (PC) with PCI interface servo control cards is the core of the proposed control system. The servo control cards are used to send the control efforts to the current amplifier driving circuits by digital to analog converters (DACs) and read the PNNS positions from the position sensors by analog to digital converters (ADCs), respectively. Moreover, the proposed control systems are realized in the PC using the “Visual Basic” language. The PC-based control system with guaranteed stability under precision positioning can be used as the prototype for commercial realization.
