利用近場電紡絲之犧牲模版技術製作奈米流道，並應用於單分子檢測及開發低成本奈米流道陣列之奈米發電機系統;Fabrication of Monolithic Polymer Nanofluidic Channels via Near-Field Electrospun Nanofibers as Sacrificial Templates and Applications to Single Molecule Detection and Pressure-Driven Nanogenerators

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题名:	利用近場電紡絲之犧牲模版技術製作奈米流道，並應用於單分子檢測及開發低成本奈米流道陣列之奈米發電機系統;Fabrication of Monolithic Polymer Nanofluidic Channels via Near-Field Electrospun Nanofibers as Sacrificial Templates and Applications to Single Molecule Detection and Pressure-Driven Nanogenerators
作者:	傅尹坤
贡献者:	國立中央大學機械工程學系
关键词:	機械工程;電子電機工程
日期:	2012-12-01
上传时间:	2014-03-17 14:24:55 (UTC+8)
出版者:	行政院國家科學委員會
摘要:	研究期間：10108~10207;This project proposes a facile and maskless method for fabricating nanofluidic channel arrays using near-field electrospinning (NFES) templates with prescribed patterns and the polydimethylsiloxane (PDMS) molding technique. Nanochannels were fabricated monolithically through three main steps: (1) direct-writing nanofiber arrays onto a silicon substrate using NFES, (2) PDMS molding of the prescribed nanofibers patterns, and (3) plasma treating PDMS substrate to promote the adhesion and bonding process. The nanochannels fabricated in this study had channel widths ranging from 500 nm - 1300 nm and depths of 70 - 500 nm, and were patterned in a fashion similar to the wire bonding process routinely used in the semiconductor industry. The nanochannel dimensions were predominately dictated by electrospun nanofibers, showing that NFES is capable of depositing nanofibers with a diameter down to ~50 nm. Preliminary results show that reliable and repeatable nanofluidic channel arrays were speedily fabricated at a very low cost, while nanofluidic patterns and dimensions are predominantly controlled by NFES in a direct-write, addressable manner. Year two of the proposed project will focus on the application sides of nanofludic channel arrays developed from year one such as single molecule detection via a single nanochannel and a pressure-driven nanogenerator module based on nanofludic arrays.
關聯:	財團法人國家實驗研究院科技政策研究與資訊中心
显示于类别:	[機械工程學系] 研究計畫

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