研究期間：10108~10207;An innovative, duo-modes micro electromagnetic generator for vibration energy harvesting is proposed. By utilizing the vibration energy (translational and rotational) from the environmental (or human) activities, the generator can act as a substitutive power source for consumer electronics and carried-on medical equipment. Through the Faraday's law of induction, the generator converts the change of the magnetic flux to the induced electromotive force (EMF) from the environmental vibration energy. Our approach for the electromagnetic generator is to use a low-temperature electroplating technique, for both the coils and magnets. The electroplated copper coils form a pair of thick spiral electrodes, which can ease the potential microstructural curling induced by inevitable residual stress. The electroplated magnets have better thickness, shape, and location controllability compared with typical bulk magnetics. Our proposed micro generator is compatible with semiconductor processes, and with MEMS fabrication techniques, it can integrate small mechanical structures and CMOS circuits. With production automation techniques, the system can integrate with portal consumer and medical devices and real-time recharge the devices.
